0.55

15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 tp 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) 22 to 102 (0.15 to 0.7) 15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 to 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) Single Double Single Double Single Double 20 12 23 15 20 12 30 23 15 33 30 15 50 33 18 53 45 12 48 15 45 12 55 48 15 58 55 15 75 58

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

MY1

22 3.5 4.5 5.5 5.5 46.7 67.3 73.2 73.2 7 12 15 15 MY1C25 MY1C32 MY1C40 16 22 22 66 82 95 6 8 8 52 67 78 MY1C50 MY1C63 40 52 20 26 66 77 18.5 19 8 8 8-11-64 62 Series MY1C Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Side Support Side support A MY-SA 2-G MX 2-H F E C D A B MTS MY Side support B MY-SB CY MG 2-J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

LEC-OM07605CN

(c) AERSBAN-_SET SD [:mm] (A B) 40 [mm] [mm] 2-5 17.5 30 B0.3 10 L A 35 C +0.3 6 -0.2 24 0 24 0 3 7 6 22 ()M4 3 5 11 . A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 B1 B 45 11 22 11.

REA/REB

Note 2) 15 has internal magnets in the body. 65 Series REBR Dimensions/15, 25, 32 Operating direction Operating direction B Operating direction A A K W HB HB HC X Piping port P (plug) Operating direction A Piping port P (plug) Operating direction B N H HA Y T CB 8-MM thread depth M HT HP 4-counter bore B Counter bore depth C HP L 4-J Effective thread length E TC X F WP WP GW GP QW PW D 4-

5 Port Solenoid Valve

B B B A A 61 107.8 9 9 29.5 29.5 A A A A A R2 3 R1 5 179 179 106 1 P PE B B B B B 12 SI Unit 21 47.5 n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port 3/4" 1(P), 5(R1), 3(R2) port 1/2" 3(R) port M5 x 0.8 Ground screw 117 B 2 B 2 B 2 B 2 B 2 B 2 B 2 76.5 19 3 1 69 55.5 53.7 12 X 51 4 A 4 A 4 A 4 A 4 A 4 A 4 A 15.5 17 22 34 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External

Precautions 1

Height D-M9 D-M9W D-A9 Reed auto switch Solid state auto switch 16.5 16.5 B A Hs Hs B A 22 22 (24.5) ( ): For D-A93 type D-H7/H7W/H7NF D-C7/C8 8.5 16 16 29 Hs Hs 26 B A B A D-B5/B6/B59W D-G5NTL 12 24.5 24.5 Hs B A 33 Hs 33 A B D-H7C D-C73C/C80C CV MVGQ 16 16 Hs Hs B A 36.7 B A 36.7 Auto Switch Proper Mounting Position (Detection at Stroke End) and Mounting Height Auto Switch Proper

MXS Series Air Slide Table

(With stroke adjuster at extension end) N-M3 X 0.5 thread 5 deep 3.5 6.5 2-M4 X 0.7 thread 6 deep (Helisert) 4 4-M3 X 0.5 thread 4 deep 1 (With stroke adjuster at extension end) 15 40 30 23 10 F 12 3H9 3 deep +0.025 0 N -1 x F 2 +0.025 0 3H9 3 deep 12 6 M 0.5 22 24 Z ZZ (NN-1) x H G H 13 6.5 6.5 13 A B 3.2 6.5 7 7 15 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 3 deep +0.025 0 3H9 3 deep +0.025

MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

SY

B B 34 77 30 17 35 A A A Manual override 15 77.5 SS5Y3-45-D .

CJ5-S

LS + Stroke LX LZ ZZ + Stroke Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 Up to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

ZP

Model A B C D E F G F G Flat Flat with ribs Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C U C U C ZPY10 10 13 16 ZPY40 40 50 43 53 19.5 29.5 47.5 73.5 25 15 63.5 7.5 3.8 18.5 28.5 46.5 72.5 62.5 6.5 3.3 ZPY50 12 12 15 20 25 18 3.5 1.2 1.8 1.7 ZPY13 N4 (Nylon tube 4/2.5) 14.5 5 1.8 22 38 59 64 3 ZPY16 12.5 22.5 38.5 59.5 64.5 N6 (Nylon tube 6/4) Deep 16.5 7 2.5 Deep H: M6 x

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

fitting (A, B port) 20 15 B B 5 1.5 2n-M5 0.8 (A, B port) (Pitch) P=10.5 15.7 Other dimensions are the same as the M5T.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 55 62 ZZ Z 16 34 16 34 G H (NN 1) x H B A 6.6 11 12 12 6H9 depth 6 +0.030 0 38 2 7 B A NN x M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 GA HA Section AA Section BB (mm) F 50 50 50 60 35 60 70 75 80 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55

MXS

4.2 CY1 A B 18.5 8.5 8.5 18.5 H MY1 (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA

Parallel Style Air Gripper Series MHZ

E1 (Double acting) E2 (Single acting) Axial Ported (with One-touch fitting for coaxial tubing) [W] (mm) Auto switch mounting groove (4 locations) (Except 10) Model A B D2 E1 D1 0.016 0.043 Applicable coaxial tubing MHZL2-10DW 12f8 15 7 11 52.8 Plug End boss assembly 0.016 0.043 MHZL2-16DW H G 16f8 20 10 15 61.4 0.020 0.053 D2 MHZL2-20DW 20f8 22 12 19 75.7 0.020 0.053 MHZL2-25DW 25f8 25 15

7.5

U side D side (L4) L3 (9.1) 8 56.2 20.8 5.5 35 DIN rail 17.2 (SJ3000) [17.5 (SJ2000)] B A B A B A B A B A DIN rail holding screw Manual override (Non-lock) 4(A) port side: Blue 2(B) port side: Yellow 30.6 Aapprox. 300 (Lead wire length) 5 L2 (DIN rail mounting hole pitch: 12.5) L1 SS5J3-M60B (S, R, RS) Stations 32.1 (SJ3000) [32.5 (SJ2000)] 15.4 (SJ3000) [15 (SJ2000)] SJ3000 SJ2000 pitch