AS

D6 Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D L18 L19 L20 18.2 18.6 22 27.2 28.1 L21 23.2 23.6 27 32.2 33.1 L22 11 12.6 17 22 28 L23 L24 18 19.6 25.8 30.8 36.8 L25 t2 Part no.

Free Mount Cylinder Series CU

20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30 11-/22-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 11-/22-CDU25 25 Suction flow rate of vacuum suction type (Reference values) Specifications Size Suction flow rate l/min (ANR) 6 10 16/20/25 Bore size (mm) Item 6 10/16 20/25 6 10 12 1.05MPa 0.7MPa 0.12MPa

Free Mount Cylinder

If rotational torque are applied unavoidably, refer to page 22.

AC Servo Motor Driver

Symbol Name and function Initial value Unit Setting range Position Speed Torque PD13 *DO1 Output signal device selection 1 (CN1-22) Any output signal can be assigned to the CN1-22 pin. In the initial setting, INP is assigned in the position control mode, and SA is assigned in the speed control mode.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18 7 14 66 220

SMC Pneumatic Clean Series

25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150

1

CA2 B port Without auto switch With auto switch Bore size (mm) ZZ S ZZ S CS1 Stroke A Stroke B 125 334 197 334 197 140 Series CQS 334 197 334 197 C76 Bore size (mm) Stroke Both of S1, S2 160 363.5 213 363.5 213 B1 A B2 L 180 401 231 393 223 C85 12 42.5 22 (52.5) 3.5 17 (27) (22) 200 411 241 393 223 5 to 30 16 42.5 22 (52.5) 3.5 17 (27) (22) 250 484.5 283 C95 S + Stroke (A + B) 20 50 26

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Electric Actuator

Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.

LVQ

For high temperature 4 8 10 16 22 Note) Options (2) cannot be combined with each other. Buffer material FFKM Pilot port thread type For ammonium hydroxide High flow spec.

LEC-OM071xx

For details, refer to 8.25.2 Positioning Command. 20 21 ACCR MONITOR1 TLIM (torque limit): 22 Set the torque limit with an unsigned value.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

24 29 21 25 22 MS 24 22 95.5 91 24 21 32 24 29 25 37 29 19 26.5 24 32 37 30 22.5 19.5 91 85.5 M LQ 26.5 24 112.5 105.5 H 25 30 26 41 49 36 24 22 106.5 100 MQR Inch Size T B side A side Class 7 E1 E2 E2 L L E1 H1 M1 H2 M2 W Model Applicable tubing O.D.

Table of Contents

22 Series CY1F Specific Product Precautions 4 Be sure to read before handing.

Rotary Actuator/Vane Type

12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 38 4 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 52 8 41 4 54 90.5 21 80 14 24 22 100.5 16 40

2/3 Port Valve

system Direct operated Pilot operated diaphragm Pilot operated disk Pilot operated Series VX21/22/23 VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

Stainless Steel 316 Fittings

23 2.5 4 1.8 1.6 d 5 8 Applicable tube 3 4 2.3 2.6 H1 H2 4 6 3.3 6 5.8 10 M A L 14 6 8 5.3 6.6 14 17 Connection thread 17 25 17 7.5 10 6.8 30 22 27.1 7.6 17 25 17 8 10 7.3 35 22 27.1 26.6 17 9 12 8 45 22 28.7 8.5 17 26.6 17 10 12 9 57 28.7 28 29.9 22 13 16 12 9.3 22 101 22 Reference dimensions after installation of R thread Male Elbow: KFG2L Applicable tube size (mm) O.D.

Series KV2 Fittings

22 25 17 17 21 21 21 22 22 25 17 21 21 17 22 22 21 25 3.5 3.5 5.4 3.5 5.4 8.5 5.4 9.8 12 15 24 31 42 37 41 79 100/200 100/200 100/200 100/200 100/100 100/100 100/100 50/100 ** Non-Standard Product, consult factory for lead time.

10

45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 MB-B12 125 136 90 78 60 15 110 32 136 13 13.5 24 14 75 267 25+0.084 0 Rotating Angle Model without air cushion is designed to include rubber bumpers.