MLGP

, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 2530022 22 6.6 8.6 8.6 1/8 1/4 1/4 18 38 47 55 30 40 50 104 200 200 200 44 60 70 11 14 14 13 9 14 118 146 158 7.5 9 9 24 24 28 86 110 124 106 130 142 48 48 52 72 92 110 300 300 300 40 50 63 M8 x 1.25 M8 x 1.25 21.5

4/5 Port Air Operated Valve Series SYJA3000

59.6 [66.6] Approx. 300 (Lead wire length) 33 48.5 [55.5] Refer to page 1-5-79 for dimensions with connector cable.

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Series AK1000

Hastelloy C-22 Hastelloy C-22 PCTFE 80 0.55 316 SS PCTFE (Option: Vespel) 70 0.48 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 Dimensions inch (mm) 50 0.34 AK1400T 40 0.28 30 0.21 2.12 (53.8) 20 0.14 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or BP) 0 0.00 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) AK1400T 80 psig (0.55 MPa) Inlet pressure

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85) 77 (85) 79 (87) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 20 20 20 13 14 14 20 20 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 300 301 to 1500 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 No trunnion mounting female thread

AC Servo Motor Driver

Symbol Name and function Initial value Unit Setting range Position Speed Torque PD13 *DO1 Output signal device selection 1 (CN1-22) Any output signal can be assigned to the CN1-22 pin. In the initial setting, INP is assigned in the position control mode, and SA is assigned in the speed control mode.

IZx-OMT0049

to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000 50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 10 200 to 300 200 to 1400 200

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

72.5 54.5 M type plug connector (M) (Lead wire length) 89 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 56 300 77 R 3 1 P Equation L1=16n+11 L2=16n+22 n: Stations (Max. 20 stations) Dimenisons L n 2 43 54 75 85.5 14 235 246 275 285.5 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 20 331 342 362.5 373 7 123 134 162.5

Hygienic Design Cylinder Series HY

Standard Stroke Standard stroke (mm) Bore size (mm) 32 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 50 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 Intermediate strokes of 1 mm each can be produced.

0.4

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

Plate Cylinder

GY 5 5.5 7 8 10 H 36 40 45 53 56 K 5.5 5.5 6 7 7 KA 10 12 14 18 18 Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 (mm) (mm) Rod End Female Thread P TN TF Model MM N NC ND NE NS NX NY S ZZ MM M6 x 1 depth 12 ZZ 69 72 75 92 96 H 14 14 15 18 21 Model MUB25 MUB32 MUB40 MUB50 MUB63 MUB25 MUB32 MUB40 MUB50 MUB63 NPT1/8 NPT1/8 NPT1/4 NPT1/4

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

The materials in parentheses are the seal materials. 21 22 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Water, Oil, Steam Dimensions: Single Unit/Body Material: Brass, Stainless Steel Normally closed (N.C.): VX210/VX220/VX230 Normally open (N.O.): VX212/VX222/VX232 Grommet: G Conduit: C Approx. 280 Q D F Approx. 300 Q D F G1/2 25 25 Width across flats H R (C) C C R Width across

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

240

) Lead 10 (LEPY10LJ) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 LEPY10 (Motor size: Basic) Horizontal Vertical 7 3 Lead 5 (LEPY10K) 6 2.5 5 2 Work load [kg] Work load [kg] 4 Lead 5 (LEPY10K) 1.5 3 1 2 Lead 10 (LEPY10J) Lead 10 (LEPY10J) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 Note) The maximum value of the work load for the positioning

AS

D6 Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D L18 L19 L20 18.2 18.6 22 27.2 28.1 L21 23.2 23.6 27 32.2 33.1 L22 11 12.6 17 22 28 L23 L24 18 19.6 25.8 30.8 36.8 L25 t2 Part no.

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

MXQ

With end lock (12): MXQ12-R Operating port 2-M5 x 0.8 5 22 22 51 3 Other dimensions are the same as basic style.

Electric Slide Tables

] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350