F

28 23 21 41.5 1/4 3/8 KQH07-U03 17.46 18.5 12.5 17 4.6 10 14 KQH10-U02 17 28 22 21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3

AS

54.7 17 20.9 AS3001F-07-3 167 88 18.5 10 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 16 AS4001F-10-3 77.7 64.4 8.2 82.1 11.3 35 69.3 61 21 18.5 AS3001F-09-3 27 21 24.5 3.5 171 95 12 AS4001F-12-3 36 70.3 62 22 3/8" 17.2 33.3 62.1 56.7 21 70.8 9.5 20.9 AS3001F-11-3 Note 1) Reference dimensions 175 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 AS4001F-11-3 24.5 188 AS4001F-13-3 21.7 1/2" 83.1 36.3

A

8 1/4-28 2 0.3 1.26 1.43 1.71 2.36 3.78 1.25 1.80 6.58 1 1/2 1 5/8 3/4 9/16 3/8 9/32 200 (2) 7/16-20 2.6 1 1/8 3/8 5/16-24 2 1/2 0.3 1.26 1.84 1.71 2.40 3.82 1.64 2.19 7.01 1 21/32 1 5/8 3/4 9/16 3/8 11/32 250 (2.5) 7/16-20 3.1 1 1/8 3/8 5/16-24 3 0 1.30 2.19 1.75 2.48 3.98 1.64 2.19 7.17 1 21/32 1 5/8 3/4 9/16 3/8 11/32 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 2.76 2.34

Table of Contents

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

Compact 5-Port Solenoid Valve

Please contact SMC for details. 1.5 m AXT100-FC26-1 AXT100-FC20-1 AXT100-FC10-1 3 m AXT100-FC26-2 AXT100-FC20-2 AXT100-FC10-2 5 m AXT100-FC26-3 AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 17 18 17 18 15 16 15 16 COM.

Table of Contents

x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100

Compact Hydraulic Cylinder

3 @3 r @5 !

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 3 (0.008 to 0.6 MPa Setting)

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: Backflow Function, Thread: Rc, Port Size: 1/8, Accessory: B+G, Specifications: 0.008 to 0.6 MPa Setting, Pressure Unit: -

5-Port Solenoid Valve

Please contact SMC for details. 1.5 m AXT100-FC26-1 AXT100-FC20-1 AXT100-FC10-1 3 m AXT100-FC26-2 AXT100-FC20-2 AXT100-FC10-2 5 m AXT100-FC26-3 AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 17 18 17 18 15 16 15 16 COM.

Air Slide Table

3 (NN 1) x H 5H9 ( ) depth 3 +0.030 0 6 8.7 14.4 A 9.5 5.1 10 24 24 A NN x M6 x 1 tapped through hole 6 +0.030 0 2 x 5H9 ( ) depth 3 GA HA Cross-sectional view A-A 45 35 16 Bottom view of MXQ16-50Z Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ16-10Z 38 16 16 8 39 39 58 22 28 98.5 4 2 72.5 87 MXQ16-20Z 38 20 20 12 39 39 58 15 39 108.5 4 2 76.5 91 MXQ16-30Z 48 21 21 30 48 48

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Valve) 10-SYJ5243-5LOU 3 sets (Valve) SYJ5000-21-3A 1 set (Blanking plate assembly) SY3000-37-28A 3 sets (Connector assembly) SY3000-37-29A 3 sets (Connector assembly) Example The asterisk denotes the symbol for assembly.

KJ

21 22 22 5 32 15.5 2.5 1 8 1 4 3 16 5 32 16 3 1 4 3 16 1 4 16.5 3.5 5 16 1 4 17 4.6 3 8 3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Applicable tubing Note) D: Max. diameter Plug-in Y: KQ2U Applicable tubing O.D.

Compact Cylinder

54 32 Cylinder stroke (mm) Bore size (mm) Both ends tapped Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 29 42 63 86 125 187 45 175 116 96 56 2 3 2 1.3 0 67 69 65 39 6 6 4 2 2 164 139 133 88 6 12 8 3 3 186 161 152 123 6 26 17 5 3 12 142 180 165 151 6 27 17 7 7 12 154 214 198 196 6 53 32 13 9 21 243 373 348 393 19 53 32 25 18 21 317 559 534 554 45 120 49 45 31 683 12 16 20 25 32

V100

(A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value for grommet (Sub-plate weight: 0.055 kg) Note 4) Note 1

NCQ2/CQ2

2 1.3 0 62 67 63 3 6 4 2 2 147 131 124 3 12 8 3 3 169 153 144 6 26 17 5 3 12 142 180 165 6 27 17 7 7 12 154 214 198 6 53 32 13 9 21 243 373 348 19 53 32 25 18 21 317 559 534 45 120 49 45 31 45 175 116 96 56 12 16 20 25 32 40 50 63 80 100 Rod end male thread Male thread Nut 55 79 118 164 222 312 488 665 61 87 131 180 241 333 521 703 67 95 143 195 261 355 554 741 73 102 155 210 281 376

SYJ3000/5000/7000

] 2-3.2 2-3.2 (For mounting) (For mounting) 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to page 1-5-79 for dimentions with connector cable. 1-5-56 57 5 Port Solenoid Valve Rubber Seal Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 3 4 5 G H C6

Hydraulic

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

1

121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.