Smooth Cylinder/Low Speed Cylinder

80 M10 x 1.5 depth 22 37 3 40 25 40 22 Up to 300 110 60 71 16 10 M26 x 1.5 41 100 37 3 M12 x 1.75 depth 22 40 30 50 26 (mm) GB Rc, NPT port GB G port Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13

Table of Contents

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

HRX-OM-X084

The weight will increase by 2kg when option T1 [Inverter pump] is selected. 12: Copper is not included when option M [Applicable to deionized water piping] is selected. 13: When option DM [Electric conductivity control + Applicable to deionized water pipng] is selected, these materials are included. 14: If the altitude is 1000 m or more, please refer to "P.3-3 When Thermo-chiller installation

42

Maximum stations are 12.

Modular F.R.L. Unit

Failure to follow this procedure can cause damage to the knob and the outlet pressure 0.1 0.1 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 2000 Flow rate L/min (ANR) 0 1000 3000 0 Conditions: Inlet pressure 0.7MPa may fluctuate. Outlet pressure 0.2MPa Pull the pressure regulator knob to unlock.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches can be mounted

REC

40 200 to 1000 Use SMC recommended speed controller.

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

Short Stroke Electric Actuator Series LX

234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299

Ionizer

How to Order IZS31 CP X13 L (Tolerance 1%) Cable length 60 L: Cable length Symbol 7 01 02 04 05 06 07 08 09 11 12 13 14 15 16 17 18 19 20 1000 mm 2000 mm 4000 mm 5000 mm 6000 mm 7000 mm 8000 mm 9000 mm 11000 mm 12000 mm 13000 mm 14000 mm 15000 mm 16000 mm 17000 mm 18000 mm 19000 mm 20 mm (Red) 1 12 (6.2) 3 Cable Specifications No. of cable wire 12 0.14 mm2 (AWG26) 0.48 mm Nominal cross section

LECA6_C

() 2 () () () 3 7.1 12 64 ()() No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - () (TB) () No. No. 063 No. TB No.

A

ln/min** 1900 ln/min** 1000 ln/min** 1900 ln/min* 400 ln/min* Port Size (IN, OUT) 38 12 38 12 14 EXH Port Size 12 14 38 38 12 INSTALLATION Pilot EXH Port Size 18 The Booster Regulator should be installed with its piston in a horizontal position.

MGG

12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116 350 to 1000 285 104 55 25 75 94 58 14 26 16 164 19 Guide Cylinder Series MGG Front mounting flange type/MGGF 63 to 100 Bracket (See table below.)

Table of Contents

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Slider Type/Ball Bushing Bearing

2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V 24 V Grommet 2-wire Water resistant (2-color indicator) 12 V F7BAV F7BA With diagnostic output (2-color indicator) IC circuit F79F 4-wire (NPN) 5 V, 12 V 3-wire (NPN equivalent) IC circuit A76H 5 V Grommet A72H A73H A80H A72 A73 A80 A73C A80C 200 V 100 V 12

Auto Switch Guide

Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Multi-Axis Step Motor Controller

For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0

Auto Switch Guide

Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

15

V IC circuit 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 12 V 5 V,12 V 12 V IC circuit Water resistant (2-color indicator) 3-wire (NPN equivalent) Grommet 24 V Reed auto switch A96V A96 IC circuit 5 V Yes A93V2 A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V No 100 V or less 1 Water resistant type auto switches can be mounted