Table of Contents RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.
(MPa) Bore size (mm) 0.035 (0.025) 1 (0.5) 0.04 (0.03) 20, 25, 32, 40 0.025 0.5 0.035 (0.025) 1(1) 0.03 0.025 1 Figures in ( ) are for 11-CM2X. 12, 16 20, 25, 32, 40 12, 16 1(0.5) 0.5 20, 25 20, 25 Figures in ( ) are for 11-CQSX. 1MPa = 145psi 1in/s = 25.4mm/s II Microspeed Cylinder/Double Acting: Single Rod Series CJ2X 10, 16 The dimensions are the same as the standard double acting single
6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.
Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.
(mm) Operation Range 20 Bore size Auto switch model 10 6 16 9 25 12.5 32 14 D-A9, A9V D-M9, M9V D-M9W, M9WV 11 7 4 5 7 7 Since this is the average value at a normal temperature including hysteresis (tolerance 30%), it is not guaranteed.
Monitor and Test Mode of the Controller . 41 11. Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.
U E OUT T OUT IN M 2 x P Port size J K L F I (D) (mm) Electrical entry M Model Flat terminal Conduit terminal Conduit C37, Stainless steel body Port size P A B C E F I J K L D Aluminum body T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U 49.5 (55) V U T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.
For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-10-11 11 Series MTS Specifications 8 10 12 6 16 8 25 20 13 32 16 40 Bore size (mm) Spline rod size (mm) 4 20 Fluid Air Without end lock 0.1 MPa 0.15 MPa 0.12 MPa Min. operating pressure With end lock 0.15 MPa 0.17 MPa Maximum operating pressure 0.7 MPa Proof pressure 1.0 MPa Ambient and fluid temperature 10
20 Double Acting Single Acting Double Acting 35, 40, 45, 50, 75, 100 75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 Construction . 6 25 Dimensions . 7 & 8 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod 12 16 5, 10, 15, 20 25, 30 How to Order . 1 Construction . 9 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11
Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type Nil Standard H High pressure 3/8 11 E 1/2 14 F 3/4 18 Other Special Options Special Entry for Pilot Port/ Insulating Adapter Type VXB215 XCA Enter standard product number.
Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.
Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry
Clean Series: Vacuum Suction Type, Bore Size: 20mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: -, Auto Switch: -, Lead Wire: -, Number: -
Clean Series: 11 (Vacuum Suction Type), Bore Size: 20mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore
speed (mm/s) 0.025 0.5 0.06 1 0.06 1 0.035 (0.025) 1 (0.5) 32, 40 32, 40 10, 16 10, 16 0.01 0.5 0.05 0.5 Figures in ( ) are for 11-CQ2X 20, 25, 32 50, 63, 80, 100 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore sizes (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min.
Description Note Material Material Note High carbon chromium bearing steel Aluminium alloy Hard anodized Body Needle roller 1 11 Nickel plated Stainless steel Heat treatment Finger Magnet 2 12 Piano wire Zinc chromated Stainless steel Piston N.O. spring 3 13 Electroless nickel plated Brass Stainless steel Nitriding Lever shaft Exhaust plug 4 14 Resin Stainless steel Magnet holder Exhaust
COM. 1/8 to 1/2 1/8 to 3/8 20 to 40 3/4 to 11/2 N.C. Features 2 Solenoid Valves Flow Characteristics (How to indicate flow characteristics) 1. Indication of flow characteristics Indication of the flow characteristics in specifications for equipment such as solenoid valve, etc. is depending on Table (1).
RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.
O-ring 11 O-ring NBR (FKM, EPDM, PTFE) NBR (FKM, EPDM, PTFE) Note 1) The seal materials shown in ( ) are available depending on the option selected.
11 O-ring O-ring (NBR) (FKM, EPDM) (NBR) (FKM, EPDM, PTFE) 12 12 Plate Stainless steel Plate Stainless steel 13 Gasket The materials in parentheses are the seal materials.