Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

LEJ-OM002xx

(Manufacturable stroke range:LEJB40/ 200 to 2000mm, LEJB63/ 300 to 3000mm) Product Weight Series LEJB40 Stroke [mm] 200 300 400 500 600 700 800 900 1000 1200 1500 2000 Weight (kg) 5.7 6.4 7.1 7.7 8.4 9.1 9.8 10.5 11.2 12.6 14.7 18.1 Extra weight of lock (kg) S2:0.2 / S6:0.3 / T6:0.2 Series LEJB63 Stroke [mm] 300 400 500 600 700 800 900 1000 1200 1500 2000 3000 Weight (kg) 11.5 12.7 13.8 15.0

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

11.5 12 17 9 9 9 9 13 13 11.5 12 17 17.5 18 23 15 7 9.5 10 15 15 7 19 11 18 18.5 23.5 15.5 9.5 12 12.5 17.5 17 11 21 15 22.5 23 28 20 9.5 12 12.5 17.5 21.5 11 25.5 15 30.5 31 36 28 3 5.5 6 11 29.5 4.5 33.5 8.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Electric Actuator Miniature Rod Type Miniature Slide table Type

) Actuator specification Horizontal Compact 10 to 200 20 to 350 Note4) Speed [mm/s] Note3) Note6) Vertical Basic 10 to 150 20 to 300 Note4) 10 to 150 20 to 300 Note4) Compact 10 to 150 20 to 300 Note4) Pushing speed [mm/s] Note5) 10 20 10 20 Acceleration / Deceleration [mm/ s2] 3000 Backlash [mm] 0.2 or less Positioning repeatability [mm] +/0.05 Lost motion [mm] Note7) 0.2 or less Impact

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Air Catch Sensor Series ISA

0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Ex. 1) To detect 300 m, select a 1.0 detection nozzle and supply pressure of 0.2 MPa.

LEC-OM02904

11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1 132 13.1.2 134 13.2 . 135 13.3 . 135 13.4 . 135 13.5

Pin Clamp Cylinder Series CKQ/CLKQ

Indicator light Lead wire Flexible fluorine resin heavy-duty cable, 6, 0.5mm2, 2 cores, 300 mm Impact resistance Switch part : 1000 m/s2, Connector part : 300 m/s2 Insulation resistance 50 M or more at 500 VDC (between lead wire and case) Withstand voltage 1000 VAC for 1 minute (between lead wire and case) Ambient temperature 10 to 60C Enclosure IEC529 standard IP67, JIS 0920 Watertight

NCM

Note 11) Exclude 2".

Compact Cylinder

Auto Switches Common Specifications Type Reed auto switch Solid state auto switch 1 ms or less 1.2 ms Operating time 300 m/s2 1000 m/s2 Impact resistance 50 M or more at 500 VDC Mega (Between lead wire and case) Insulation resistance 1500 VAC for 1 minute (Between lead wire and case) 1000 VAC for 1 minute (Between lead wire and case) Withstand voltage 10 to 60C Ambient temperature IEC60529

Stability of suction position,

ZP3EU-F6-TB12 [Weight: 236 g] ZP2 ZP2V 26 18 26 18 ZP Width across flats 22 M12 x 1.75 M12 x 1.75 Width across flats 22 ZPT ZPR 6 27 19 52 6 27 19 52 11 11 XT661 32 32 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 93.8 78.6 Applicable pad part no.

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

AC Servo Motor Driver (CC-Link Type)

Requires set up software(MR Configurator2TM) . -11- 3. Wiring 3.1 Power Supply Wiring Connect the actuator and driver power supply. (1) LECSC (Absolute encoder) EX.)

Air Cylinder Series CM2

7 143 Dimensions other than mentioned above are the same as on page 209. 45 30 15 10 52 66 82 39 18 11 53 53 77 154 154 36 11 10 54 30 55 75 23 27 10 3.2 134 171 44.5 Up to 300 Up to 500 177 188 47.3 143.5 to 500 Up to 300 Up to 300 Precautions on Trunnion Style, Flange Style 1.

JXCx-OMY0004

/s 4-7 DWORD Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 8-9 WORD Acceleration 1 to Max ACC of the basic parameter (5, 11, 14) 1mm/s2 10-11 WORD Deceleration 1 to Max DEC of the basic parameter (5, 11, 14) 1mm/s2 12-13 WORD Pushing force (5, 11, 14) 1% (Thrust setting 14-15 WORD Trigger LV (5, 11, 14) 1% value) 16-17 WORD Pushing (5, 11, 14) 1mm/s speed 18-19 WORD

mlu

M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 KA NE NF NI NJ NY H2 K MM MM1 NA NB NC ND NG NH NH1 NS P S ZZ ZZ1 Model 10 12 14 18 M10 x 1.25

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

3 4 5 M8 connector (WO): 10-SY3 40(R)-WO-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 66.5 34 41.4 115.3 60 97.5 [101.9] 117.1 [121.5] 42.3 [44.5] 20.5 11 11 20.5 11 20.5 11 11 11 32.5 [34.7] 27.5 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176 for dimensions of connector types. 63 Base Mounted 10-

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 SJ SY 800 700 600 500 400 300