Thermo-con/Rack Mount Type

Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.

JXCx-OMT0023

11 11.

CM2

SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A, #11, #3 SCM232A, #11, #3, #19 CM2L40SCM240A, #11 SCM240A, #11, #3 SCM240A, #11, #3, #19 1.4-40 Series CM2 Front Flange (F) CM2F Bore size Stroke S T (mm) Bore N NA NN P E B2 C2 D H2 I A F K AL FD Z B FT MM B1 FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

CG1

11 11 12 11 11 10 10 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 Note) The drawing below shows the single acting/spring return style.

Electric Rotary Table

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Square Tube Type Air Cylinder Series MB1

(Refer to Rod boot/Air cushion on page 11.)

HRX-OM-W002

Facility water temp. 600 Heating capacity [W] Heating capacity [W] 600 40 40 32 32 25 400 25 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig 9-11 Heating capacity (HRR012-A/W-10,HRR018-A/W-10) 9.5.2 HRR012-A/W-20,HRR018-A/W-20 800 800 Ambient temp. Ambient temp. or or Facility water temp.

Environment

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

LEYx-OMZ0015

Note 11) Only when the motor option, "with lock", is selected. -8- [Product weight] [kg] Model LEY25 (Top/Parallel) LEY25D (in-line) Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 Incremental Encoder(S2) 1.3 1.4 1.6 1.8 2.0 2.2 2.3 2.5 2.7 1.3 1.4 1.6 1.8 2.0 2.2 2.4 2.5 2.7 Motor type Absolute Encoder(S6) 1.4 1.5 1.6 1.9 2.0 2.2 2.4 2.6 2.8 1.4 1.5 1.6 1.9

VEX1

900 800 700 600 C 500 400 300 200 100 0 1000 900 800 700 600 D 500 400 300 200 100 0 1000 900 800 700 600 E 500 400 300 200 100 0 1000 900 800 700 600 F 500 400 300 200 100 0 When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

4/5 Port Solenoid Valve

11 11 11 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to back page 11 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43

Compact Type

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

Compact Type Dual-Rod Cylinder Series CXSJ

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

1.1

IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Mass (kg) 275 259 355 299 320 35 355 299 320 42 IDF-TR-8 E C G B D A 4 x F (mm) A 540 B 400 C 260 D 300 E 11 F 30 G 94 Transformer part no.

VFR

Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 l3 l1 Single clevis with ball joint