MLGP

kg) Load weight m (kg) 50 50 10 40 40 1 32 32 1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-11 11 Series MLGP Operating pressure 0.4 MPa Operating pressure 0.5 MPa or more Vertical Downward Mounting (Slide bearing) MLGPM20 to 100 (13) 50 Stroke or Less V = 200 mm/s (14) Over 50 Stroke V = 200 mm/s 100 100 80 100 80 100 100 100 80 80 63 63 63

MLGP

200 0.7 10 50 100 200 RLQ Eccentric distance l1 (mm) Eccentric distance l1 (mm) MLU MLGPL32 to 100 ML1C (12) Over 50 Stroke V = 400 mm/s (11) 50 Stroke or Less V = 400 mm/s D100 50 100 -X 100 2080 80 Data 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-11 11 Series MLGP Operating

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Proposals for Energy Saving

12 16 16 80 100 112 58 61 75 100 125 138 220 244 270 11 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Series MGZ Construction y@9 #1 q i o rt !

Parallel Style Air Gripper Series MHZ

MHZJ2-6D/MHZAJ2-6D MHZJ2-25D/11-MHZ2-25D 100 Pressure 0.7 MPa 6 Pressure 0.7 MPa 0.6 MPa Gripping force (N) Gripping force (N) 80 0.6 MPa 0.5 MPa F 4 0.5 MPa 60 0.4 MPa 0.4 MPa 0.3 MPa 40 0.3 MPa 0.2 MPa 2 0.2 MPa 20 F 0 20 40 60 80 100 0 10 20 30 Gripping point L (mm) Gripping point L (mm) External Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 20 Gripping force (N) Gripping force (N)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 50 63 10-CG1W80 80 10-CG1W100 11-CG1W20 11-CG1W25 11-CG1W32 11-CG1W40 11-CG1W50 11-CG1W63 11-CG1W80 11-CG1W100 Lubrication Action Standard stroke (mm) Port size Model Rubber Air 10-CG1W20 10-CG1W25 10-CG1W32 10-CG1W40 10-CG1W50 10-CG1W63 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 VQZ SY5000 SY5000-11-10 VQD SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 VFS Plug (white) VS Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces.

CLA

14 113 21 30 72 80 750 20-750 23 17 M12X1 .75 11 M22X 1. 5 100 -750 20750 37 40 11 6 140 V 'I.. 92 30 52 14 124 21 31 76 25 19 M12X 1.75 11 M26X1 .5 IBore Size (mm) MM X1US N Without Boot With BootLZ H ZZ ee f h !

7ND9071en

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%

Sine Rodless Cylinder Series REA/REB

Distance from cylinder shaft center, Lo, is the moment working point between the cylinder and the load. 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) Recommended driving force Fn (N) 500 100 300 20 30 40 50 200 Usable range 100 Usable range 10 REA 50 40 30 5 REB 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 REC 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Guide Cylinder Series MGG

(mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100 35 54 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 120 14 16 10 100

MB

55 55 62 59.5 55.5 113.5 65.5 60 103 56.5 53.5 60.5 53.5 53.5 C85 125 66.5 66.5 71.5 70.5 67.5 125 76.5 72 115 68.5 65 72 65 65 C95 Operating Range CP95 (mm) Auto switch type Bore size 32 40 50 63 80 100 125 NCM D-Z7/Z80 13 10 17 7.5 8.5 7.5 9.5 9.5 10.5 9 9 10 11 11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Bore size (mm) T l U V W H Z ZZ e f h Z ZZ 40 11 18 7.5 8 66 204 219 55 25 92 230 245 50 11 21 10 9 73 220 238 60 28 99 246 264 1/4 stroke 63 11 23 12 10 80 236 258 65 30 106 262 284 80 11 26 16 13 90 262 284 80 32 116 288 310 100 12 30 20 16 100 287 311 100 35 123 310 334 1/5 stroke 125 12 30 20 16 100 292 318 100 35 123 315 341 160 12 40 24 20 108 328 358 120 38 131 351 381 96 Series

MHZ

100 150 Misc.

MHZ

Internal Grip MHZ2, 11-MHZ2 MHZ2-6 MHZ2-25/11-MHZ2-25 40 100 Pressure 0.2 MPa Pressure 0.2 MPa 30 Overhang H (mm) Overhang H (mm) 80 H H 0.5 MPa 0.5 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.6 MPa 0.6 MPa 60 0.3MPa 0.3MPa 20 0.7 MPa 0.7 MPa 0.7 MPa 0.7 MPa 0.3 MPa 0.3 MPa 0.4 MPa 0.4 MPa Gripping point L 40 0.4 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.6 MPa 10 20 MHZAJ2, MHZJ2 0 20 40 60 80 100