High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

Rotary Table/Rack & Pinion Style Series MSQ

Nil S n Reed switch Auto switch A90 Solid state switch M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision style B Basic style 2 pcs. 1 pc. n pcs.

High Purity Fluoropolymer

Model G F B H L E M M 3 4 LQ1T12 LQ1T11 1/8 10 11.5 18.5 8 4 2 Class 1 LQ1T52 LQ1T51 LQ1T42 LQ1T41 LQ1T33 LQ1T32 LQ1T31 LQ1T22 LQ1T21 12 19 10 12 6 8 10 4 6 15 16.5 28 14 12 6 4 20 23 36.5 17 18 9 5 F (E) 2-B L M 20 28 45 21 22 11 6 1/4 G 29 39 54 26 28 14 7 (E) (E) H L L 25 19 LQ1T62 LQ1T61 Class 2 to 5 39.5 49 69.5 36 36 18 8 Inch sizes Applicable tubing O.D.

10

Q F G1/2 23 Y C R E C R (1.5) (1.5) Y E B1 B A B1 B A 2 x P Port size 2 x P Port size Terminal part U W M U W M Flat terminal connector 250 Series X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole 11 9 6.5 15 (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM131-01-35 (R, B, G, Y) A VM151-01-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

SMC

A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

MXQ

5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA 5H9 depth 5 +0.030 0 6 B A NN-M6 x 1 thread depth 12 24 9.5 9.5 5.1 5.1 10.5 10.5 B H A 21 9 21 9 (NN 1) x H G Section AA Section

CNG

45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) 20 25 32 40 K KA MM NA PG PH

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

Sine Cylinder Series REC

MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45

Sine Cylinder Series REC

MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45

Sine Cylinder Series REC

MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45

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A B A B A B A B 50 12.5 16.5 8.5 12.5 7.5 11.5 8 12 7 11 80 18 23.5 14 19.5 13 18.5 13.5 19 12.5 18 Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 50 32.5 38.5 36 34 44.5 50 80 40 45 74 43 71.5 41 70 49.5 78.5 61 84.5 *1: The auto switch mounting bracket BMG2-012 is used. *2: The auto switch mounting bracket BMG1-040 is used. *: Adjust the auto switch after confirming the operating conditions in the

MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

KJ

(inch) Weight (g) Model d L M2 M1 Applicable tubing Applicable KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 tubing 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8 3

CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Lead wire length) 87.2[91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector