Programless controller Step motor (servo 24 VDC)

2000 50 2000 100 2000 90 2000 10 150 2500 75 2500 150 2500 100 2500 11 200 3000 100 3000 200 3000 110 3000 12 250 3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 60 No.

ITV

Straight type (4 cores) Cable connector 3 m Right angle type (4 cores) Cable connector 3 m 100 84 50 (33) 52 40 4 x 7 Setting part 12.5 M12 x 1 Cable connection thread (Plug type) 11 71 12 Digital pressure display M3 x 0.5 Solenoid valve EXH Solenoid valve EXH 1/8 (Rc, NPT, NPTF, G) EXH port 11 8.5 SUP OUT EXH (3) 11 1.6 13.5 Flat bracket assembly P398010-600 (Option) 2 x 1/8, 1/4 (Rc, NPT

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

For details, refer to pages 11 and 12. Table 1.

smcmaintenancepartslist

size 32 3 to 4 1 125 15 to 17 3 100 8 to 10 2 80 6 to 8 1.5 63 4 to 5 1.5 50 3 to 5 1 40 3 to 4 1 100 st Extra 50 st 344 Series CL1 40 to 100 Replacement Procedure of Seal 3 6.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station L1 L2 L1 L2 A, B port size

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Usable range 10 CX 10 Usable range 5 5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5

SYJ3000/5000/7000

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

MG

200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 (11) 50 Stroke or Less, V = 400 mm/s (12) Over 50 Stroke, V = 400 mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg) 50 5 10 50 40 40 5 32 1 32 1 10 50 100 200 0.2 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-14 Compact Guide Cylinder Series MGP Horizontal

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

Compact Manifold Regulator Series ARM5

End plate L 11 1 No.

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

SYJ300/500/700

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

5 Port Solenoid Valve Series VQZ1000/2000/3000

pitch: 12.5) L1 (3.2) C6: 52.6 N7: 56.4 (Station 1) (Station n) 104.2 [108.6] 95.6 [100] 47.8 [50] 1 0 PWR 7 6 20 14 9 8 COM 15 (11) (7.5) 58.8 [65.8] Connector locking pin SI unit (Remove before wiring the connector assembly.)

C95

60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5 14 18 16 66 86 18 47 40 50 60 63 15 100 18 20 13.5

KJ

11 !2 !33 !4 !5 !

PF2A/PF2W

min 5 l/min 40 l/min PF2W540 PF2W540T 45 l/min 3.5 l/min 10 l/min 100 l/min PF2W511 110 l/min 7 l/min Rated flow rate range of sensor Set flow rate range of sensor 16-11-35