Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VQD1151 NO SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, 0.11098 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VALVE, SOL, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, .11624 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VALVE, SOL, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, .13119 lb

1

T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F.O.F.* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

4/5 Port Solenoid Valve

0.075 0.062 0.062 0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3

Table of Contents

(mm) M5> M5> Weight (g) Model A M L Nylon Urethane 0.9 KJH23-M3 KJH23-M5 KJH23-01S KJH04-M3 KJH04-M5 KJH04-01S KJH06-M5 KJH06-01S M3 x 0.5 M5 x 0.8 R M3 x 0.5 M5 x 0.8 16.3 16.7 13.7 13.6 12.7 0.9 1.6 2 4.7 1.9 2.4 4.6 3.3 5.2 7 3.2 3 2.5 9.8 1 8 13.8 16.3 17 13.7 13.9 14.8 17.8 19.4 10 0.9 0.9 8 12.7 4 4 4 10.8 R 1 8 10 M5 x 0.8 14.7 4 10 4 10 13.5 10 6 15.4 R 1 8 Applicable

2

(mm) Weight (g) Nylon Urethane 3.2 M5 x 0.8 KQ2U23-M5l 10 7.1 33.8 30.8 13.3 7.1 5.2 6 3.2 2.2 2.2 1.8 5.8 P D 4 M5 x 0.8 KQ2U04-M5l 10 8.2 33.9 30.9 13.3 8.2 5.7 6 3.2 2.2 2.2 1.8 6.7 M6 x 1.0 KQ2U04-M6l 10 8.2 34.9 30.9 13.3 8.2 5.7 6 3.2 2.2 2.2 3 6.6 M 6 M5 x 0.8 KQ2U06-M5l 12 10.4 35 32 13.3 10.4 6.8 6 3.2 2.2 2.2 1.8 10 M6 x 1.0 KQ2U06-M6l 12 10.4 36 32 13.3 10.4 6.8 6 3.2 2.2 2.2 3

ZP

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

V100

+ M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10

Table of Contents

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

KJ

(mm) M5> M5> Weight (g) Model A M L Nylon Urethane 0.9 KJH23-M3 KJH23-M5 KJH23-01S KJH04-M3 KJH04-M5 KJH04-01S KJH06-M5 KJH06-01S M3 x 0.5 M5 x 0.8 R M3 x 0.5 M5 x 0.8 16.3 16.7 13.7 13.6 12.7 0.9 1.6 2 4.7 1.9 2.4 4.6 3.3 5.2 7 3.2 3 2.5 9.8 1 8 13.8 16.3 17 13.7 13.9 14.8 17.8 19.4 10 0.9 0.9 8 12.7 4 4 4 10.8 R 1 8 10 M5 x 0.8 14.7 4 10 4 10 13.5 10 6 15.4 R 1 8 Applicable

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-37-4A Thread type 1 2 3 Stations Rc Nil A, B port size G F Thread piping N NPT Symbol Port size M5 x 0.8 10-SY3000 Applicable series NPTF T 10-SS5Y3-41P-06-C6 Manifold base (6 stations) 10-SY5000 M5 Except M5 01 1 8 10-SS5Y3-41P-06-C6 1set (Type 41P, 6 station manifold base part no.)

Table of Contents

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x

CATALOG

2 7 21.5 18 14.5 2.5 2.9 3.2 M5x0.8 KJF23-M5 7 7 21 7.5 14.5 3/2.5 2.9 4 M3x0.5 KJS04-M3 1.5 8 18 15.5 14.5 1.4 1.5 4 M3x0.5 KJF04-M3 8 8 18 5.5 14.5 4 3.2 4 M5x0.8 KJS04-M5 2.5 8 20.5 17 14.5 4 2.6 4 M5x0.8 KJF04-M5 8 8 20.5 7.5 14.5 4 3.8 4 R(PT)1/8 KJS04-01S 3 9.8 21.5 17.5 14.5 4 5.3 6 M5x0.8 KJF06-M5 10 10 20 7 15.5 10 5.1 6 M5x0.8 KJS06-M5 2.5 10 21.5 18 15.5 4 3.2 6 R(PT)1/8 KJS06

Table of Contents

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Compact Cylinder

1.0 52 10 10 5 5.5 15 M5 x 0.8 5 to 50 0.043 M5 x 0.8 5 53.5 39.5 32 34 12.5 M8 x 1.25 21.5 49.5 13 16 45 2 4.5 14 14 7 14 0 0.052 5.5 21 10 to 50 1/8 63.5 49.5 75, 100 For details about the rod end nut and accessory brackets, refer to page 19.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.075 0.062 0.062 0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3

ZP

Form w 1 Material e Vacuum inlet r Width across flats K Connection thread 10 13 A5 67 46 29.9 21 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 67.5 46.5 30.4 21.5 10 13 A Q 72 46 29.9 21 2.5 10 8 M5 x 0.8 16 72.5 46.5 30.4 21.5 20 25 83.5 57.6 39.8 29 3.5 25.9 12 12 M8 x 1.25 32 84 58.1 40.3 29.5 40 86.5 60.6 42.8 32 4 50 87.5 61.6 43.8 33 20 25 A8 26 D C B N S U F GN GS M A6 M6 x 1 8 4 04 06 08 ZP

AS

7 12.7 12.3 28.6 25.8 25 22.2 9.6 8 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 3.2 9.3 22.1 17.3 8.4 22.1 17.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 M5 x 0.8 M5 x 0.8 3/16" 4 7 16.5 7 8 11.4 21.3 26.1 9.3 22.2 9.6 25 25.8 28.6 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 10-32UNF 3/16" 10-32UNF 11.7 28.6 25.8 25 22.2 9.6 8 AS121F-M5