Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

fitting (A, B port) Applicable tube C4: T0425 C6: T0604 10.6 C4: (3) C6: (3.2) 32.3 A B 5 11 10 19 2-2.6 (Mounting holes for manifold) Manual override Depress and turn to operate and lock override. 103.2 (GZ, GS: 104.6) [106.6] Manual override (Non-locking) 29.5[36] 23 17.1 10.5 26.6 10 3 20 11 2-2.6 (Mounting holes) 15 39.3 93.4 R1 P R2 21 5-M5 X 0.8 (Piping port) [ ] for AC 3 4 5 3 4 5

Proposals for Energy Saving

10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

A

63 BA-01 20 BA-02 25 BA-32 32 BA-04 40 BA-05 50 BA-06 63 BA-08 80 BA-10 100 Courtesy of Steven Engineering, Inc. !

0.4

Purchasing order is available in units of 10 pieces. VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Manifold Type: Base Mounted, Valve Stations: 10 Stations, A, B Port: ø6 One-touch Fitting

Table of Contents

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

SV

, 2(B) port Flow Characteristics Port size Flow characteristics 1 4/2(P A/B) 4/2 3/5(A/B E) Model 4, 2 (A, B) C6 C8 C10 C12 1, 5, 3 (P, EA, EB) C8 C10 C12 C12 C [dm3/(sbar)] 0.98 2.1 4.2 6.2 C [dm3/(sbar)] 1.1 2.4 4.3 7.0 Cv 0.24 0.46 0.91 1.3 Cv 0.28 0.48 0.93 1.6 b 0.26 0.20 0.22 0.19 b 0.35 0.18 0.21 0.18 SS5V1-10 SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

C8 1/8 C6 C8 1/8 1/8 C6 C8 Body ported for internal pilot Base mounted for internal pilot 10-SS5YJ7-20 10-SYJ723 10-SS5YJ7-21 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42-C6 10-SS5YJ7-42-C8 10-SYJ743 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Model: 3, Stations: 10, A, B Port: One-touch Fitting for ø6

Model: 3, Stations: 10, A, B Port: C6 (One-touch Fitting for ø6)

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

Compact Manifold Regulator

Description 136144-S Common supply bushing 136144-K Individual supply bushing Single unit regulator / Port plug for regulator block 136144-S 136144-K Semi-standard Description None Oil-free Symbol Nil X17 A-A A A-A A 12 12 10 A A 8 8 15 15 10 738 Regulator Single Unit Type ARM10 Series ARJ AR425 to 935 How to Order ARX Standard Type ARM10 06 B Z 1 q w e r t N AMR 1.

Compact 5-Port Solenoid Valve

Side Ported Internal Pilot How to Order Manifolds JJ5SY 3 10 F 1 05 D C6 Made to Order (Refer to page 135 for details.)

Table of Contents

O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8

Table of Contents

06 3/4 1 Thread type ON-flow range Note 1) IF30 is available for 06.