Table of Contents

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 V.

VCC

C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.

VZS

Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 L1 L2 3-7-17 18 Series VZS2000 Non plug-in type Manifold VV5ZS2-51Station

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN. 2.

SZ3000

Purchasing order is available in units of 10 pieces.

Parallel I/O Type: NPN, I/O Cable Length: w/o Cable, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 150mm, Accuracy: Basic

Parallel I/O Type: NPN, I/O Cable Length: w/o Cable, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 50mm, Accuracy: Basic

Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: DIN Rail, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 50mm, Accuracy: Basic

Parallel I/O Type: NPN, I/O Cable Length: 1.5m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 150mm, Accuracy: Basic

Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 350mm, Accuracy: Basic

Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 300mm, Accuracy: High Precision Type

Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: DIN Rail, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 150mm, Accuracy: Basic

Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 150mm, Accuracy: Basic

Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 350mm, Accuracy: Basic

Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 450mm, Accuracy: Basic

Parallel I/O Type: NPN, I/O Cable Length: 1.5m, DIN Rail: DIN Rail, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 200mm, Accuracy: High Precision Type

Parallel I/O Type: PNP, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 350mm, Accuracy: Basic

Parallel I/O Type: NPN, I/O Cable Length: 5m, DIN Rail: DIN Rail, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 250mm, Accuracy: Basic

Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Actuator: Ball Screw Drive, Size and Lead: 16B [Size 16, Step Motor (Servo/24VDC), 5mm Lead], Stroke: 50mm, Accuracy: Basic