V

10-32UNF 1/2 8 13.2 14.2 11.8 15.8 42.2 25.6 39.5 35.1 10.5 17 35 38.9 33.9 ASP330F-N01-09S 5/16 NPT1/8 10-32UNF 1/2 8 15.2 14.2 11.8 15.8 44.7 28.2 39.5 35.1 10.5 18.7 35 41.7 36.7 ASP430F-N02-07S 1/4 NPT1/4 NPT1/8 11/16 1/2 13.2 18.5 15 18 43.9 25.6 48.7 42.6 10.9 17 68 41.7 36.7 ASP430F-N02-09S 5/16 NPT1/4 NPT1/8 11/16 1/2 15.2 18.5 15 18 46.4 28.2 48.7 42.6 10.9 18.7 68 46.9 41.9 ASP530F-N03

A

14 159 63 10 S Y M B O L S NAMD250-N03 38 172 76 10 NAMD350-N04 12 204 90 10 NAMD450-N06 34" 225 106 10 NAMD550-N10 1" 259 122 10 NAMD650-N14 112" 361 160 10 NAMD850-N20 2" 473 220 10 Manual and Autodrain Types are same overall dimensions.

0.01

(Nil) IN side connection symbol OUT side connection symbol IN side connection symbol Connection size OUT side connection symbol Connection size C04 C06 C08 C10 C12 02 N02 F02 C04 C06 C08 C10 C12 02 N02 F02 4 6 8 10 12 4 6 8 10 12 Clean One-touch fittings (KP series) Clean One-touch fittings (KP series) Specifications The specifications are the same as the standard models.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

30

(inch) H (Width across flat) 12.7 17.46 12.7 17.46 12.7 17.46 22.23 14.29 17.46 22.23 17.46 22.23 23.81 22.23 23.81 Connection thread NPT Note 1) D M Weight (g) L1 L2 Model KQB2F01-N01 KQB2F01-N02 KQB2F03-N01 KQB2F03-N02 KQB2F07-N01 KQB2F07-N02 KQB2F07-N03 KQB2F09-N01 KQB2F09-N02 KQB2F09-N03 KQB2F11-N02 KQB2F11-N03 KQB2F11-N04 KQB2F13-N03 KQB2F13-N04 24.1 29.1 24.6 29.6 25 30 31.2 27.2 32.2

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Dual Speed Controller with One-touch Fitting Series ASD 1

Port size 10 8 6 12 1/8" 1/4" 3/8" 5/32" 3/16" 5/16" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

ASD

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

VH Series, 4 Way Hand Valve

(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411

2-Color Display Digital Flow Switch Series PFM

(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725

Speed Controller: Standard Type Series AS In-line Type

-32 UNF 10-32 UNF AS120-M5-D M5 x 0.8 8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 9 9 4.7 10 31 10.3 0.7 27.4 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 R 1/8 14.3 14.6 7.2 18 35.6 14.1 1.2 31.6 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 R 1/4 18 19.5 7.2 27.2 40.7 18 1.2 36.7 AS320-N02-SD NPT 1/4 NPT 1/4 AS320-F02-SD G

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Model T2 H D1 T1 D2 D3 L3 L4 L1 L2 9 4.7 10 31 10.3 0.7 27.4 13 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 14.3 R 1/8 14.6 7.2 18 34.7 13.2 1.2 31.6 33 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 18 R 1/4 19.5 7.2 27.2 40.2 17.5 1.2 36.7 72 AS320-N02-SD NPT 3/8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Pressure range Switch 100 kPa 0 0.5 MPa 10 MPa 15 MPa 0.4 MPa 1 MPa 0 1 MPa For 1 MPa (For Air) ISE70 100 kPa (0.1 MPa) 1 MPa For 10 MPa (For General Fluids) 10 MPa 0 ISE75 10 MPa 0.4 MPa For 15 MPa (For General Fluids) 0 15 MPa ISE75H 0.5 MPa 15 MPa The ISE75(H) switch shows zero (0) when the pressure being applied goes below the lower limit of the set pressure range, when the cut-too-zero

ISE70/75/75H

1 2-color Display Digital Pressure Switch Series ISE70/75/75H ZSE ISE PSE Metal Body Type Metal Body Type Metal Body Type (Die-cast aluminum) Z I SE3 10 MPa 15 MPa 10 MPa 15 MPa 1 MPa 1 MPa For General Fluids For General Fluids PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

The set value can be copied to up to 10 switches simultaneously.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

High-Precision Digital Pressure Switch

The set value can be copied to up to 10 switches simultaneously.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Body Ported Type Vacuum Ejector ZH Series

10 One-touch One-touch One-touch 08 02 10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch