5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-8 9 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Example of Application Circuit Caution Handling of application circuits 1.

Digital Flow Switches

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10

VCC

) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80 25 75 SGC SGH VNC n 6 4 2 3 Gate valve Aluminum + hard anodized containing PTFE and POM are used for a part of the manifold material.

PF2A/PF2W

type Nil N F Rc NPT G Wiring specifications Nil N 3 m lead wire with connector Without lead wire Port size Applicable model Flow rate (l/min) Port size Symbol 100 200 500 50 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 01 02 03 04 1/8 1/4 3/8 1/2 PF2A510

Magnetically Coupled Rodless Cylinder

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Digital Flow Switches, Series PF2A, Series PF2W

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

App. 33 APPENDIX Recommended Parameter Values [LESYH] LESYH16 LESYH16D LESYH25 LESYH25D Lead symbol A B A B A B A B 16(20) 8(10) Series Lead (Pulley (Pulley (Including pulley 10 6 10 6 16 8 ratio ratio ratio) 5/4) 5/4) Initial value Recommended value Parameter *1,*2 Para.

AC Servo Motor Driver (Network card type ）

Pb: Ball screw lead [mm] 1/n: Reduction ratio Pt: Servo motor encoder resolution [pulse/rev] S: Travel distance per servo motor revolution [mm/rev] (a) Setting example of a ball screw Machine specifications Ball screw lead Pb = 10 [mm] Reduction ratio: 1/n = Z1/Z2 = 1/2 Z1: Number of gear teeth on servo motor side Z2: Number of gear teeth on load gear 1/n 1/n = Z 1/Z2 = 1/2 Z2 Pb = 10 [mm

E-P HYREG ® Series VY1

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

2/3 Port Valve for Various

$% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

SYJ3000/5000/7000

(Pitch) P = 10.5 For (Built-in One-touch fitting) C4 N3 For M5 14.5 Manual override 32.5 14.8 0.5 2.7 91.9 [96.3] 1/8 (P port) 78.8 [83.2] 10 A A A A A 53.9 [56.1] 54.7 [56.9] 31.7 25 25 P 35 P B B B B B 34.9 18.9 2-4.5 (For mounting) 4 L2 L1 (4.4) (Light/Surge voltage suppressor) (Station n) (Station 1) (Station n) (Station 1) + + + + + (Light/Surge voltage suppressor) + + + + + B B B B

5 Port Solenoid Valve Series VQZ1000/2000/3000

solenoid SY3000-37-81A--N for double solenoid SY3000-37-81A-B B B B B B B B B B + IN + + +++A IN A NI NI B B O T U O T U 2 4 To CYL port To CYL port P.930 P.931 P.932 P.941 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

Speed Controller with Indicator

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller: Standard Type Series AS In-line Type

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Series VQ Base Mounted Metal Seal/Rubber Seal

L n Equation L1=10.5n+44.5, L2=10.5n+72.5 n: Station (Max.16) Dustproof SI unit: L5=10.5n+97 L6=L3+25, L7=L4+25 Dimensions (mm) Manifold S kitSV5Q11M, #8 Valve 2 position single SV5Q11V, #9 2 position doubleSV5Q11V, #10 3 position SV5Q11V, #10 16 212.5 240.5 262.5 273 15 202 230 250 260.5 14 191.5 219.5 250 260.5 13 181 209 237.5 248 12 170.5 198.5 225 235.5 11 160 188 212.5 223 10 149.5

LEC-OM071xx

11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

None S F 03 N 2 GS D B A E3 04 F 3 DN JSXD31 3 Cannot be used in combination with body material symbol A 4 WN 5 6 7 8 B J Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD41 C N 03 R 1 G None None S F 04 N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD41 Series/ Valve type Body material Seal material Port

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

125

x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size