HRX-OM-R026

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 9 Filter Rc3/8 20m FQ1011N-10-T020-B-X61 Note Note) The filter shown above cannot be directly connected to the thermo-chiller.

Digital Flow Switch (Manifold type)

Flow range: 0.5 to 4 L/min (symbol 04) Flow range: 2 to 16 L/min (symbol 20) Flow range: 5 to 40 L/min (symbol 40) -52No.PF-OMW0004-B Flow rate characteristics for several supply units Flow range: 0.5 to 4 L/min (symbol 04) (reference value) Nil S P W -53No.PF-OMW0004-B Flow range: 2 to 16 L/min (symbol 20) (reference value) Nil S P W -54No.PF-OMW0004-B Flow range: 5 to 40 L/min (symbol

HRX-OM-X027

L PE N N PE For option B L PE N L Fig. 3-6 Wiring of power supply cable(Thermo chiller side) 3.3 Installation HRS-R Series 3-12 HRX-OM-X027 Chapter 3 Transport and Setting Up Wiring 1. Connect the power supply cable to the secondary side of the earth leakage breaker and grounding.

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Series SV

A B A B 29.6 17.5 56.3 COM PWR Manual override Press and turn for the locking type. 4(A) port side: Orange 2(B) port side: Green SI unit ( ) Silencer (air discharge port) (with built-in silencer specification) L2 5 (Rail mounting hole pitch: 12.5) L1 Light/Surge voltage suppressor (Station n) (Station 1) 85.5 79.4 61.8 16.2 (for DIN rail mounting) (10) 14.7 L dimensions n: Stations L n 2

Valve Single Unit

stations 20 20 stations This also includes the number of b l a n k i n g plate assembly.

Valve Single Unit

stations 20 20 stations This also includes the number of b l a n k i n g plate assembly.

HRX-OM-W058

L PE N N For option B PE L PE N L Fig. 3-6 Wiring of power supply cable(Thermo chiller side) 3.3 Installation HRS-R Series 3-12 HRX-OM-W058 Chapter 3 Transport and Setting Up Wiring 1. Connect the power supply cable to the secondary side of the earth leakage breaker and grounding.

LVQ

N.C. valve LVQ20S N M C A B D (Max.

Plug-in/Plug Lead: Single Unit

M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48 68.5 Stations D side 42 16 15.5 61.8 133 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96

Silencer Series AN

S I O N S SERIES NAN SILENCER S Y M B O L S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more Ambient & Fluid Temperature 5~60C / 40~140F H O W T O O R D E

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) CP95 Hs 24.5 27 30.5 35 40.5 47.5 A 27.5 27.5 28.5 33 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 26 26 27 30 38 38 A 29 29 30 34.5 42 42 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 NCM NCA DOperating Range -X Bore size (mm) Auto switch model 20 D-C7/C80/C73C/C80C D-B5/B64 50 63 25 32 40 208 10 9 10 10 11 D-B59W

CG1

A B A B A B A B A B HS HS HS 20 9 3 6 8 6.5 4.5 24.5 27 27.5 20.5 14.5 17.5 19.5 18 16 25 9 3 6 8 6.5 4.5 27 29.5 30 20.5 14.5 17.5 19.5 18 16 32 10 4 7 9 7.5 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 19 17 40 14.5 8.5 11.5 13.5 12 10 35 37.5 38 24 18 21 23 21.5 19.5 50 17 11 14 16 14.5 12.5 40.5 43 43.5 28.5 22.5 25.5 27.5 26 24 63 17 11 14 16 14.5 12.5 47.5 50 50.5 28.5 22.5 25.5 27.5 26 24

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-8 9 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Example of Application Circuit Caution Handling of application circuits 1.

Digital Flow Switches

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10

VCC

) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80 25 75 SGC SGH VNC n 6 4 2 3 Gate valve Aluminum + hard anodized containing PTFE and POM are used for a part of the manifold material.

PF2A/PF2W

type Nil N F Rc NPT G Wiring specifications Nil N 3 m lead wire with connector Without lead wire Port size Applicable model Flow rate (l/min) Port size Symbol 100 200 500 50 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 01 02 03 04 1/8 1/4 3/8 1/2 PF2A510

Magnetically Coupled Rodless Cylinder

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Digital Flow Switches, Series PF2A, Series PF2W

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10