SMC Corporation of America
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Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications. This valve functions properly at an operating pressure as low as 1x10-6 Pa (absolute). Face seal and compression fitting options offer extremely low levels of internal and external leakage. Two DC and eight AC voltage options are available, paired with multiple electrical entry
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Note 8) Grommet value. 10 XSA-OMS0001-A Fluid property Face seal fitting / compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 C [dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Threaded ports XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 C [dm3/(sbar)] 0.54 1.14 1.14 2.23 2.37 3.5 b 0.36 0.39 0.42 0.38 0.40 0.15 3.

-2S 63 31.5 73.5 35 29.5 63 32.5 49.5 50 57 25.5 63 67 55 55 102 57 71 XSA2-2V 56 XSA2-43S 64.5 31 3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 3/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Model: 2 (Size 2), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)

Model: 2 (Size 2), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: T (Terminal w/Surge Voltage Suppressor)

Model: 2 (Size 2), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: B (180°)

Model: 2 (Size 2), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor), Special Electrical Entry: A (90°)

Model: Size 2, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -