High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Heater specifications Itemsymbol XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.
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Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage