High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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High Vacuum Angle Valve 1 CE-compliant Q CE-compliant Nil 437 B XLG/XLGV Series Specifications Model XLG(V)-16 XLG(V)-25 XLG(V)-40 Double acting (Dual operation), Pressurize to open/close Inert gas under vacuum 5 to 60 (High temperature type: 5 to 150) XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 Valve type Fluid XLG XLGV Operating temperature (C) 5 to 50 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) Atmospheric
Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage
Valve Type: Double Acting, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: -
J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.