High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLG Series Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal
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1 CE-compliant Q CE-compliant Nil 437 B XLG/XLGV Series Specifications Model XLG(V)-16 XLG(V)-25 XLG(V)-40 Double acting (Dual operation), Pressurize to open/close Inert gas under vacuum 5 to 60 (High temperature type: 5 to 150) XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 Valve type Fluid XLG XLGV Operating temperature (C) 5 to 50 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) Atmospheric
1 CE-compliant Q CE-compliant Nil 437 XLG/XLGV Series Specifications Model XLG(V)-16 XLG(V)-25 XLG(V)-40 XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLG 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLGV 5 to 50 Operating pressure (Pa) (abs) Atmospheric pressure to 1 x 10-5 Conductance
Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage