High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal
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XLG/XLGV Series Made to Order specifications (For details, refer to pages 442 to 447) How to Order XLG M9N A 16 Flange size 16, 25, 40 XLG M9N A 50 1 Flange size 50, 63, 80, 100, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160
1 CE-compliant Q CE-compliant Nil 437 XLG/XLGV Series Specifications Model XLG(V)-16 XLG(V)-25 XLG(V)-40 XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLG 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLGV 5 to 50 Operating pressure (Pa) (abs) Atmospheric pressure to 1 x 10-5 Conductance
J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.