High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLF Series Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of
Similar items in stock.
Compact and lightweight Portable type weighing only about 100g (unit 50g, battery 50g) can also be held in the palm of the hand. Measurement unit switching for global use Freely selectable display units and easy unit conversions also make it ideal for the SI unit transition period.
Bore size (mm) GR-S-050 (50g) 6 A set of two of !3 and !4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: L (L Type Plug Connector)
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage
Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: -
Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor
Ordering example (SS3J3-V60-l) With plug (24 VDC) SJ3A6N-5MZ-P (2 sets) With plug (24 VDC) SJ3A6N-5MZ-DP (4 sets) SUP/EXH block (D side mounting) 1 3 2 D side U side Stations SS3J3-V60-06D 1 set (Manifold part no.) SJ3A6N-5MZ-DP 4 sets (With plug part no.) SJ3A6N-5MZ-P 2 sets (With plug part no.) The asterisk denotes the symbol for assembly.
SJ3160N-5MZ-C6 2 sets (Single solenoid part no.) SJ3260N-5MZ-C6 4 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc. The valve arrangement is numbered as the 1st station from D side. Indicate the valves to be attached below the manifold part number, in order starting from station 1 as shown in the drawing.
Ordering example (SS3J3-V60-l) With plug (24 VDC) SJ3A6N-5MZ-P (2 sets) With plug (24 VDC) SJ3A6N-5MZ-DP (4 sets) SUP/EXH block (D side mounting) 1 3 2 D side U side Stations SS3J3-V60-06D 1 set (Manifold part no.) SJ3A6N-5MZ-DP 4 sets (With plug part no.) SJ3A6N-5MZ-P 2 sets (With plug part no.) The asterisk denotes the symbol for assembly.
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
Applied unit Contents Contents Contents 6 8 12 16 20 25 8 12 16 20 25 6 8 12 16 20 25 MXS8R-PS MXS12R-PS MXS16R-PS MXS20R-PS MXS25R-PS MXS6P-PS MXS8P-PS MXS12P-PS MXS16P-PS MXS20P-PS MXS25P-PS MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-050 (50g) GR-L-005 (5g) GR-L-010 (10g) GR-L-020 (20g) GR-L-050 (50g) Set of nos. above !7 to !
Contents D6 8 12 16 20 25 MXQ 6-PS MXQ 8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-050 (50g) GR-L-005 (5g) GR-L-010 (10g) GR-L-020 (20g) GR-L-050 (50g) 8 12 16 20 25 6 8 12 16 20 25 MXQ 8R-PS MXQ12R-PS MXQ16R-PS MXQ20R-PS MXQ25R-PS MXQ 6P-PS MXQ 8P-PS MXQ12P-PS MXQ16P-PS MXQ20P-PS MXQ25P-PS -X Guide Individual -X Cylinder 127 Series MXQ Auto Switch
Hole sizes for centralized piping on the bottom WX 47 56 90 120 Y 15.5 15 45 50 S 14.5 18 d 10 10 18 18 D 17.5 17.5 26 26 R 1.1 1.1 1.8 1.8 Applicable O-ring Model MY1B 50G MY1B 63G MY1B 80G MY1B100G C15 P22 MY1B Bore size G SMY1B Bore size , #2 (#2 + #6) 16 Mechanically Jointed Rodless Cylinder Series MY1B 1 in = 25.4 mm Dimensions (mm) Side Support Side support A MY-S A 2-G 2-H F E C
-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1