High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLF Series Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of
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XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
Example) XLFV-40L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLFV-16, 25, 40: SYJ319, XLFV-50, 63, 80: SYJ519 Example) SYJ319-1GS, etc.
Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.) Female connector Brass 2 Electroless nickel plated Strainer Brass 3 Case 4 Resin Orifice Resin Stainless steel 5 Silencer Bronze 6 Replacement Parts Part no. IDG1 IDG3H IDG5 IDG5H IDG10 IDG10H IDG20 IDG20H No.
H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.) Hose nipple Width across flats 8(7) (12) The above figure shows the 6/4 hose nipple mounting dimensions.
Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)
Discharge capability 1) Flow-rate characteristics PB1013A Flow-rate characteristics (5Hz) PB1013A flow-rate characteristics (When operated at PB1013A5Hz 5H ) 0.7 Discharge pressure (MPa) 0.6 SUP=0.7MPa 0.5 MPa SUP=0.5MPa 0.4 SUP=0.35MPa 0.3 SUP=0.2MPa 0.2 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution The above flow characteristic graph is for clean water (viscosity
x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 120L x 145L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 35L x 40L x 45L x 50L x 55L
Mounting bolt Mounting bolt Spring Return Spring Extend CUJ Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model
Spring Return Spring Extend Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model CDQP2B12-5S -10S CDQP2B16-5S
CQ-M3 x 35L x 40L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 60L Cylinder model Mounting bolt part no.
Cylinder model Mounting bolt size Mounting bolt size CQSKB12-5D -10D -15D -20D -25D -30D M3 x 25L x 30L x 35L x 40L x 45L x 50L M3 x 25L x 30L x 35L x 40L x 45L x 50L M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 30L x 35L x 40L
x 45l x 50l M3 x 25l x 30l x 35l x 40l x 45l x 50l M5 x 25l x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l 6.5 6.5 Head
-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve