High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve -16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1
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Voltage resistance 10 to 500Hz Pulse width 1.5mm or acceleration 98m/s2 PS1100 ON OFF ZSE3 ISE3 Vibration resistance Switch turns ON when the pressure is smaller than setting pressure (at the smaller vibration) in X, Y, Z directions (2 hours) 980m/s2 X, Y, Z directions (3 times for each direction) Shock resistance GS Weight 5g (Excluding lead wire) Pressure Switch Calibration Port size 6
Bore size (mm) Thread size Pulling force N Stroke (mm) 16 M2.5 x 0.45 x 25L or more 4.9 2 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. Rubber cap 447 Air Cylinder: With End Lock Series CBJ2 Construction (Not able to disassemble) Head end lock !3 !1 Air Cylinders !6 !7 e !5 o !0 i !2 !8 u CJ2 w CM2 CG1 @0 !9 t !
CJ1 CJP Spring CJ2 Lock piston Thread size Bore size (mm) 20, 25, 32 40 Stroke (mm) Pulling force M2.5 x 0.45 x 25l or more 2 4.9 N CM2 M3 x 0.5 x 30l or more 3 10 N Pressure CG1 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. MB Piston rod MB1 Rubber cap 2. Lock piston is pushed up further. CA2 CS1 CS2 2.
Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required. 4.9N 2 20, 25, 32 M2.5 x 0.45 x 25L or more M3 x 0.5 x 30L or more 40 10N 3 6. Use a speed controller with meter-out control. Lock cannot be released occasionally by meter-in control.
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5SZ -10SZ CQ2B40-5SZ -10SZ CQ2B50-10SZ -20SZ CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5TZ -10TZ CQ2B40-5TZ -10TZ CQ2B50-10TZ -20TZ CQ-M3 x 25L x 30L CQ-M3 x 25L x 30L CQ-M5 x 25L x 30L CQ-M5 x 30L x 35L CQ-M5 x 30L x 35L CQ-M5 x 35L x 40L CQ-M6 x 45L x 55L
Example) Bolt M3 x 25L 4 pcs.
Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l
D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L (N)CQ2B12-5S (N)CQ2B12-5T CQ-M3 x 25L 6.5 6.5 -10S (N)CQ2B16-5S (N)CQ2B16-5T CQ-M3 x 25L 5 5 -10S (N)CQ2B20-5S (N)CQ2B20-5T CQ-M5 x 25L 7.5 7.5 -10S (N)CQ2B25-5S (N)CQ2B25-5T CQ-M5 x 30L 9.5 9.5 -10S (N)CQ2B32-5SZ (N)CQ2B32-5TZ CQ-M5 x 30L 9 9 -10SZ (N)CQ2B40-5SZ (N)CQ2B40-5TZ CQ-M5 x 35L 7.5 7.5 -10SZ (N)CQ2B50-10SZ (N)CQ2B50-10TZ CQ-M6 x