High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLF Series Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of
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XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9B--Solid State, Gen.
Valve Type: Normally Closed, O-ring Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Open, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: w/
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]
Valve Type: Normally Closed, O-ring Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor
Valve Type: Normally Closed, O-ring Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -
Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa
Look up from the 5Hz switching cycle to find the intersection with SUP=0.35MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 9l/min (ANR). 1 0 2 3 4 5 6 7 8 9 10 Cycle (Hz) Caution 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.
Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa
H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz
H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector)
Valve Type: Normally Closed, O-ring Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -