High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLF Series Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of
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Stations 5 4 3 2 1 V114-5GZ 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.) V100-77-1A 1 set (Blank plate assembly part no.) V114-5GZ 4 sets (Valve) The asterisk () is used when referring to assembly. Enter the asterisk at the beginning of individual cmponent part numbers.
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 100, Flange Type: D [K (DN)], Valve Direction: F (w/Indicator, Left Flange Surface), Version: Legacy, Auto Switch: M9B--Solid State, Gen.