High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Light
Operations Manual: High Vacuum L Type Valve It was confirmed that XLD-25, XLD-40 XLD-50, XLD-63 and XLD-80 satisfied the product specification up to 2 million cycles, XLD-100 and XLD-160 did up to 1 million cycles. Test piece posture: lateral : The test was performed with FKM, the standard sealing material.
DISASSEMBLY DRAWING 1) AR20K-B/25K-B/30K-B/40K-B/50K-B/60K-B Disassembly drawing Stem assembly (Convex) Valve Mounting screws (4 pcs) Valve spring Valve guide assembly Packing holder Bonnet "O"ring Adjust screw assembly "O"ring Valve guide Adjust spring Check valve assembly Cover (Concave) Diaphragm assembly AR30K-B AR40K-B AR50K-B AR60K-B Mounting screws (2 pcs) (Detent4 places) Check valve
Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)
Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)