High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve It was confirmed that XLD-25, XLD-40 XLD-50, XLD-63 and XLD-80 satisfied the product specification up to 2 million cycles, XLD-100 and XLD-160 did up to 1 million cycles. Test piece posture: lateral : The test was performed with FKM, the standard sealing material.
Check the SpeedWork Load Graph on page 75. 73 Model Selection LEYG Series Battery-less Absolute (Step Motor 24 VDC) Moment Load Graph Horizontal Mounting, Sliding Bearing LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 t L = 50 mm y L = 100 mm 10 10 LEYG32M E/40M E LEYG32M E/40M E LEYG32M E/40M E LEYG32M E/40M E Load mass m [kg] Load mass m [kg] LEYG25M E LEYG25M E LEYG25M E LEYG25M
Micro mesh element EM810 Hydraulic fluid type (See Table 6-3) Table 6-4 Nominal filtration Symbol Nominal filtration 003 3m 005 5m 010 10m 020 20m 040 40m Note) Refer to the Table 6-7 for the product number of the O-ring for the element. 074 74m 105 105m 149 149m 270 270m 15 / 17 FGX-OM-F001-A [2] Replacement Differential pressure indicator Table 6-5 5.
XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.