High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Applicable thread Gasket M-3G2 M3 M-5G2 M5 M-6G M6 Brass Description Part no.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Version: None, Auto Switch: M9B--Solid State, Gen.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 12 VDC, Electrical Entry: G [Grommet
With auto switch Calculation example: CDQ2DS32-20DCM Basic weight: CDQ2BS32-20DC Additional weight: Both ends tapped Rod end male thread Double clevis 263g 6g 43g 151g Weight/Auto Switch Mounting Bracket Mounting bracket Cylinder bore size Weight(g) BQ-2 32 to 50 1.5 463g Refer to p.5.3-75 for auto switch weight.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector)
Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light
Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -, Non-standard
Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: 2, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -, Non-standard