High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAV-E Similar items in stock.
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Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 63, Flange Type: D [K (DN)], Valve Direction: F (w/Indicator, Left Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 63, Flange Type: D [K (DN)], Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light
(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.
SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.
SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1SET 1SET 1SET 1SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side. For ejector valves only (Without solenoid valves: individual wiring type is compliant only.)
(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.