High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAV-E Similar items in stock.
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Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light &
DISASSEMBLY DRAWING 1) AR20K-B/25K-B/30K-B/40K-B/50K-B/60K-B Disassembly drawing Stem assembly (Convex) Valve Mounting screws (4 pcs) Valve spring Valve guide assembly Packing holder Bonnet "O"ring Adjust screw assembly "O"ring Valve guide Adjust spring Check valve assembly Cover (Concave) Diaphragm assembly AR30K-B AR40K-B AR50K-B AR60K-B Mounting screws (2 pcs) (Detent4 places) Check valve
(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.
SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.
SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1SET 1SET 1SET 1SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side. For ejector valves only (Without solenoid valves: individual wiring type is compliant only.)