SMC Corporation of America
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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Compact and lightweight Portable type weighing only about 100g (unit 50g, battery 50g) can also be held in the palm of the hand. Measurement unit switching for global use Freely selectable display units and easy unit conversions also make it ideal for the SI unit transition period.

Bore size (mm) GR-S-050 (50g) 6 A set of two of !3 and !4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

Applied unit Contents Contents Contents 6 8 12 16 20 25 8 12 16 20 25 6 8 12 16 20 25 MXS8R-PS MXS12R-PS MXS16R-PS MXS20R-PS MXS25R-PS MXS6P-PS MXS8P-PS MXS12P-PS MXS16P-PS MXS20P-PS MXS25P-PS MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-050 (50g) GR-L-005 (5g) GR-L-010 (10g) GR-L-020 (20g) GR-L-050 (50g) Set of nos. above !7 to !

Contents D6 8 12 16 20 25 MXQ 6-PS MXQ 8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-050 (50g) GR-L-005 (5g) GR-L-010 (10g) GR-L-020 (20g) GR-L-050 (50g) 8 12 16 20 25 6 8 12 16 20 25 MXQ 8R-PS MXQ12R-PS MXQ16R-PS MXQ20R-PS MXQ25R-PS MXQ 6P-PS MXQ 8P-PS MXQ12P-PS MXQ16P-PS MXQ20P-PS MXQ25P-PS -X Guide Individual -X Cylinder 127 Series MXQ Auto Switch

Hole sizes for centralized piping on the bottom WX 47 56 90 120 Y 15.5 15 45 50 S 14.5 18 d 10 10 18 18 D 17.5 17.5 26 26 R 1.1 1.1 1.8 1.8 Applicable O-ring Model MY1B 50G MY1B 63G MY1B 80G MY1B100G C15 P22 MY1B Bore size G SMY1B Bore size , #2 (#2 + #6) 16 Mechanically Jointed Rodless Cylinder Series MY1B 1 in = 25.4 mm Dimensions (mm) Side Support Side support A MY-S A 2-G 2-H F E C

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: M (M Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: Z (w/Light

Valve Type: Normally Closed, Bellows Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -, Non-standard Indicator:

Valve Type: Normally Closed, Bellows Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard