SMC Corporation of America
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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light &

How to Order 03 K 30 AWG G1 AWG20K AWG40K Option Body size Symbol Nil 1 2 6 8 C J N W Z Description 0.02 to 0.2 MPa setting Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard With drain guide Non-relieving Drain cock with barb fitting: 6 x 4 nylon tubing Applicable model AWG20K to 40K AWG20K to 40K AWG20K to 40K AWG30K, 40K AWG20K AWG20K to 40K AWG20K to 40K AWG30K, 40K

Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8

Symbol Nil B Note 1) C D E G Note 2) P Applicable models AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K F Note 2) G Note 1) Drain guide: For NPT 1/4 (applicable to AW30K and 40K), the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30K and 40K).

to 40K 8 Metal bowl with level gauge AW30K, 40K With back flow mechanism C With bowl guard AW20K J Note 5) Drain guide 1/4 AW30K, 40K Note) AW10 comes with a back flow mechanism as a standard feature.

Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8

Note 2) Symbol Nil B C D E G H Applicable model AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K Port size Body size Symbol Port size 20 30 40 Float type auto drain (N.O.)

ARG20(K) AR20P-410S AR20P-150AS AR20P-050AS ARG20P-400S GB2-10AS ARG20P-420S AR20KP-020AS ARG20K, 30K, 40K Note Qty. No.

V114-5LU Electrical entry L shaped plug connector (L) Coil rated voltage [V] 24 Allowable voltage fluctuation -10 to 10% Power consumption [W] 0.4 [Starting 0.4,Holding 0.1] Surge voltage suppressor varistor Indicator LED LED 19 - 4-3.