High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAV-E Similar items in stock.
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Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.93948 lb
x 5pcs. + 5g x 5pcs. + 41g = 266g 48 - Doc. no.
FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V
XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions
XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]