SMC Corporation of America
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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

Find the pilot air pressure and pilot air consumption for a discharge rate of 6l/min and a total lifting range of 25m. [The transfer fluid is fresh water (viscosity 1mPaS, specific gravity 1.0).] If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to discharge pressure of 0.1MPa. Caution 1.

Find the pilot air pressure and pilot air consumption for a discharge rate of 6l/min and a total lifting range of 25m. [The transfer fluid is fresh water (viscosity 1mPaS, specific gravity 1.0).] If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to discharge pressure of 0.1MPa. Caution 1.

Find the pilot air pressure and pilot air consumption for a discharge rate of 6l/min and a total lifting range of 25m. [The transfer fluid is fresh water (viscosity 1mPaS, specific gravity 1.0).] If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to discharge pressure of 0.1MPa. Caution 1.

(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Dimensions [mm] Model L1 L2 A B C D E F G J K 138 LEPS10m-25m 152.5 20 22 30 29 20 29 39 88.2 61.8 LEPS10m-50m 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10Lm-25m 124 138.5 20 22 30 29 20 29 39 88.2 47.8 LEPS10Lm-50m 149 163.5 24 43 34 50 24 50 60 113.2 19 Series LEPY/LEPS Specific Product Precautions 1 Be sure to read before handling.

25M 63.5 N/A 43.0 2r0 Pl\41201\1 * PM225M PRO110M --+ PR0225M Alld mens ons in millmeterc, ACB AcD URETHANE STRIKER CAP (UC) QE, Cololoq 1{0. Port l{unber $odel (lef) A t, "ilf' u(E609 (98609079 PMft Alt 20 / 1 25M, 220 / 22yt r0.030.5 3 u(2940 (92940079 PMI5OOM 24.5 44.5 i 4 u(30t0 cs30l00t9Pti?

Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1SET 1SET 1SET 1SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side. For ejector valves only (Without solenoid valves: individual wiring type is compliant only.)