High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve -16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4
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Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.27351 lb
CDP-5A 18 0.050 0.093 76.5 5 Polished round 18 66.5 4 4 x 25l 100 CDP-6A 80 20 0.065 0.117 83 5 Polished round 20 73 4 4 x 30l CDP-7A 100 25 0.065 0.117 88 5 Polished round 24 78 4 4 x 36l Cotter pin and flat washer are included.
Voltage resistance 10 to 500Hz Pulse width 1.5mm or acceleration 98m/s2 PS1100 ON OFF ZSE3 ISE3 Vibration resistance Switch turns ON when the pressure is smaller than setting pressure (at the smaller vibration) in X, Y, Z directions (2 hours) 980m/s2 X, Y, Z directions (3 times for each direction) Shock resistance GS Weight 5g (Excluding lead wire) Pressure Switch Calibration Port size 6
Bore size (mm) Thread size Pulling force N Stroke (mm) 16 M2.5 x 0.45 x 25L or more 4.9 2 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. Rubber cap 447 Air Cylinder: With End Lock Series CBJ2 Construction (Not able to disassemble) Head end lock !3 !1 Air Cylinders !6 !7 e !5 o !0 i !2 !8 u CJ2 w CM2 CG1 @0 !9 t !
CJ1 CJP Spring CJ2 Lock piston Thread size Bore size (mm) 20, 25, 32 40 Stroke (mm) Pulling force M2.5 x 0.45 x 25l or more 2 4.9 N CM2 M3 x 0.5 x 30l or more 3 10 N Pressure CG1 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. MB Piston rod MB1 Rubber cap 2. Lock piston is pushed up further. CA2 CS1 CS2 2.
Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required. 4.9N 2 20, 25, 32 M2.5 x 0.45 x 25L or more M3 x 0.5 x 30L or more 40 10N 3 6. Use a speed controller with meter-out control. Lock cannot be released occasionally by meter-in control.