High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve -16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4
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VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .
VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .
VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .
SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Stations 5 4 3 2 1 V114-5GZ 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.) V100-77-1A 1 set (Blank plate assembly part no.) V114-5GZ 4 sets (Valve) The asterisk () is used when referring to assembly. Enter the asterisk at the beginning of individual cmponent part numbers.
SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
V114-5GZ VS VFN 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.) V100-77-1A 1 set (Blank plate assembly number) V114-5GZ 4 sets (Valve) To order valves and options mounted onto the manifold at the factory, list the valve/option with an asterisk () in front of each part number.
Stations 3 2 1 SY114-5GZ Blank plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5.1set (S41 type 5-station manifold part number) SY100-77-1A .1set (Blank plate assembly part number) SY114-5GZ.4set (Valve) : Assembly symbolprefix "" mark to the installed solenoid valve part number.
SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Note 2) For 10-V124(A) How to Order Valve Manifold Assembly Ordering example Stations 5 4 3 2 1 Valve (N.C.) 10-V114-5GZ 2 1 3 2 Blanking plate assembly V100-77-1A Manifold base (5 stations) 10-VV100-S41-05-M5 10-VV100-S41-05-M51 set (S41 type 5 station manifold part no.)