High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAV-E Similar items in stock.
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Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 220 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor
Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light
Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light
Inside diameter 25 approx. 2m) (The opposite side 4Eye bolt (O.D.10, Length Compressed air outlet JIS flange 65A 10K For Option K 16K 4x 20 Drain tube direction(Nil) Drain tube Ventilation approx. 0.7m) condensed water Drain tube for (O.D.10, Length 9351 78 18 267 8x 19 4x 19 A A Flange bolt hole Drawing of view A 1130 140 1120 140 655 Other than 18 Option K Option K Model 75 direction
(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K
EVS Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25-3M Although A, B+ and B marks are indicated on the terminal block, VFR5000 can be used as either +COM or COM.
or ring type, size 4, 22-16 AWG) NVFR4000, SOOO: 1.2S-3.SM, 1.2SY-3L, 1.25Y-3M e(+. -) indicate the direction of DC solenoid valve with light or with surge voltage suppressor.