High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAV-E Similar items in stock.
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XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting
XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting
Ordering example (SS3J3-V60-l) With plug (24 VDC) SJ3A6N-5MZ-P (2 sets) With plug (24 VDC) SJ3A6N-5MZ-DP (4 sets) SUP/EXH block (D side mounting) 1 3 2 D side U side Stations SS3J3-V60-06D 1 set (Manifold part no.) SJ3A6N-5MZ-DP 4 sets (With plug part no.) SJ3A6N-5MZ-P 2 sets (With plug part no.) The asterisk denotes the symbol for assembly.
SJ3160N-5MZ-C6 2 sets (Single solenoid part no.) SJ3260N-5MZ-C6 4 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc. The valve arrangement is numbered as the 1st station from D side. Indicate the valves to be attached below the manifold part number, in order starting from station 1 as shown in the drawing.
Ordering example (SS3J3-V60-l) With plug (24 VDC) SJ3A6N-5MZ-P (2 sets) With plug (24 VDC) SJ3A6N-5MZ-DP (4 sets) SUP/EXH block (D side mounting) 1 3 2 D side U side Stations SS3J3-V60-06D 1 set (Manifold part no.) SJ3A6N-5MZ-DP 4 sets (With plug part no.) SJ3A6N-5MZ-P 2 sets (With plug part no.) The asterisk denotes the symbol for assembly.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: Z (w/Light
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage