High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAQ_XLDQ-E Similar items in stock.
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B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.
VM230-02-40A 340 g 230 g (Add to 2 basic units.)
Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface
Variation: A (Normally Closed, Bellows Seal), Flange Size: 40, Indicator, Actuator Port Direction: A (w/Indicator, Actuator Port Direction on Flange Side), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9// (w/o Auto Switch, w/Built-in Magnet)
Variation: Normally Closed, Bellows Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: w/o Auto Switch, w/Built-in Magnet, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
Auto switch model Lead wire length (m) Load voltage Special function Type Electrical entry Indicator light Wiring (output) CX2 Pre-wired connector Applicable load 0.5 (Nil) 1 (M) 3 (L) 5 (Z) AC DC Perpendicular In-line CXW M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Solid state switch Reed switch