Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens
Operations Manual: XL-OMV0005 Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.
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SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve
Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA
) : Not available Single rod Double rod Cushion Page Air Rubber Air Rubber 392 402 Symbol Specifications Applicable bore size 32 to 100 125 32 to 100 125 32 to 100 125 32 to 100 125 Standard Standard V V V V V V V V Long st Long stroke V V V V V V V V 32 to 125 D Built-in magnet V V V V V V V V MBl-lJ K With rod boot V V V V V V V V 25A Copper (Cu) and Zinc (Zn)-free Note 1) 32 to 100 V
Mass Auto Switch Internal Circuit (g) D-M9NA D-M9NA 8 D-M9PA 8 D-M9BA 7 Auto switch model DC (+) Brown 0.5 Main circuit of switch OUT Black 14 14 13 1 Lead wire length (m) 41 41 38 3 68 68 63 5 DC (-) Blue Dimensions D-M9PA (mm) D-M9mA DC (+) Brown M2.5 x 4L Slotted set screw Main circuit of switch OUT Black Indicator light SMC 4 DC (-) Blue 2.8 2.7 24 D-M9BA 0.2 3 3.2 4 OUT (+) Brown 6 Most
Auto switch model Lead wire length (m) Load voltage Special function Type Electrical entry Indicator light Wiring (output) CX2 Pre-wired connector Applicable load 0.5 (Nil) 1 (M) 3 (L) 5 (Z) AC DC Perpendicular In-line CXW M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Solid state switch Reed switch
At this position, 4 mm from the end of the operating range. 506 Water Resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NA(V)/D-M9PA(V)/D-M9BA(V) RoHS Auto Switch Specifications Grommet PLC: Programmable Logic Controller D-M9A, D-M9AV (With indicator light) Water (coolant) resistant type 2-wire load current is reduced (2.5 to 40 mA).
Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106