Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens
Operations Manual: XLA Series -16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.
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16 44.7 24.1 15.6 41.5 32.8 7.5 6 12 16 KQ2R12-16A 18.5 45.7 25.1 17 58.3 46.1 9 7 Note) D is maximum diameter.
Valve mounting screw falling-out-prevention type EX600 Series Standard (Valve mounting screw not falling-out-prevention type) VM SY30V-16A-1 SY30V-16AR-1 SY50V-16A-1 SY50V-16AR-1 SY70V-16A-1 SY70V-16AR-1 SY30V-16A SY30V-16AR SY50V-16A SY50V-16AR SY70V-16A SY70V-16AR Internal pilot External pilot Internal pilot External pilot Internal pilot External pilot SY3000 XT34 SY5000 SY7000 The part
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: 50, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: L (3m), Number: B (1pc, Valve Open)
Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: L (3m), Number: B (1pc, Valve Open)
Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Open, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Open, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side)
Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79