Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens
-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.
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Valve mounting screw falling-out-prevention type EX600 Series Standard (Valve mounting screw not falling-out-prevention type) VM SY30V-16A-1 SY30V-16AR-1 SY50V-16A-1 SY50V-16AR-1 SY70V-16A-1 SY70V-16AR-1 SY30V-16A SY30V-16AR SY50V-16A SY50V-16AR SY70V-16A SY70V-16AR Internal pilot External pilot Internal pilot External pilot Internal pilot External pilot SY3000 XT34 SY5000 SY7000 The part
16 44.7 24.1 15.6 41.5 32.8 7.5 6 12 16 KQ2R12-16A 18.5 45.7 25.1 17 58.3 46.1 9 7 Note) D is maximum diameter.
Y-14A Y-16A H2 H1 L1 A H I type single knuckle I-12A I-14A I-16A Bore size (mm) 125 140 160 NT-12 NT-12 NT-16 18 18 21 181 186 198 100 105 110 65 65 76 125 125 140 29 These safety instructions are intended to prevent hazardous situations and/or equipment damage.
L L2 m Dd9 Part no. 125 140 160 I-12A I-14A I-16A IY-12 IY-14 IY-16 125 140 160 +0.084 0 0.1 0.3 5 69.5 79.5 8 54 46 100 M30 x 1.5 27 33 0.065 0.117 25 32 4 4 x 40 25 +0.084 0 0.1 0.3 5 76.5 86.5 8 54 48 105 M30 x 1.5 30 39 0.065 0.117 28 36 4 4 x 40 28 +0.1 0 0.1 0.3 5 84.5 94.5 8 60 55 110 M36 x 1.5 34 39 0.080 0.142 4 4 x 40 32 40 32 Split pin is included.
*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V,12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93 V V V V No 100 V or less A90V A90 A90V A90 V V IC circuit Relay, PLC 24
Applicable rod end nut A L1 H1 H A L1 H1 H2 H I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 125 140 160 NT-12 NT-12 NT-16 110 50 3.5 100 156.5 125 65 100 181 18 110 50 3.5 105 161.5 125 65 105 186 18 120 56 3.5 110 170.5 140 76 110 198 21 Symbol -XC87 Cylinder with
MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 12 MY16-16A-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke C4 MY63-16B-Stroke C4 13 MY16-16B-Stroke O-ring Side seal assembly Scraper Piston seal Cushion seal Tube gasket O-ring 5.1 x 3 x 1.05 5.1 x 3 x 1.05 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 18 4 x 1.8 x 1.1 MYMK-20-Stroke
A, H DimenSions when Mounting a Single/Double Knuckle Joint together with a Rod End Nul H, Applicable knuckle joint part number ~bol B~ L, H, H A I type single knuckle sIZe (mm) Ytype double knuckle " Bore size (mm) A H 125 3.5 100 1-12A Y-12A 50 156.5 110 125 65 125 ~ 140 3.5 105 1-14A Y-14A 50 161.5 110 140 65 125 160 1-16A Y-16A 56 3.5 110 170.5 120 160 76 140 11 ., Ie 'I.'"
Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side)
Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -