Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens
Operations Manual: XL-OMV0005 Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.
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Example) XLA-16-2M9NA-XAN1A Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates.
Example) XLA-16-2M9NA-XAN1A Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates.
) Note 16) Note 16) Note 16) Note 16) Note 16) Note 8) Pressure can be set higher than the specification pressure in some cases, but use pressure within the specification range.
-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.
XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200
Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80
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An auto switch can be retrofitted in the following cases.
① When the part number on the nameplate of the product indicates it has an auto switch (e.g., XLA-40-2M9NA, etc.)
② When there is no auto switch but a magnet is mounted on the piston part (e.g., XLA-40-2M9// etc.)
Note) For XLFV-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.
(Take care not to damage the surface of the seal mounting groove.) 16 XL-OMV0003 7-3. Assembly Procedure Step 1 Preparation Step 2 Reassembly of valve seal 2 Apply a spanner to the width across the flats of the shaft to prevent it from rotating. Note) For XLG-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.
Note) For XLF-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.