Search Results "XGTP313-50336-1"
Parallel Seal Type Slit Valve, HIGH VACUUM VALVE, L41, 14 lb
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
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Operations Manual: Parallel Seal Type Slit Valve If you have any questions, please contact your SMC sales representative. 9 - 5Spare Parts List For XGTP312-50336-*** Description Orderable Part No Applicable Part No Note Body ASSY XGT300-1-1AS XGTP312-50336For XGTP313-50336-*** Description Orderable Part No Applicable Part No Note Body ASSY XGT300-1-1-3AS XGTP313-50336Common Spare Parts List Description Orderable Part No Applicable Part
Your search for XGT returned 4 result(s)
There were no hits with the full part number, but there were 2 hits in the keyword search.