SMC Corporation of America
Elite Part Number Search
Search Results "XGTP311-50336-1"
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
  • Long service life: 3 million cycles (within standard temperture range)
  • Low particle generation: reduced by 1/5 or more (compared with the current product)
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No Note XGTP31 -50336-1 or XGTP311-50336A1-1 XGTP31-50336-2 Bonnet ASSY XGTP311-50336A1-1A XGTP31 -50336A XGTP311-50336A1-1C XGTP31 -50336C XGTP311-50336A1-1F XGTP31 -50336F Gate ASSY XGTP300-2-1S XGTP31 -50336Bellows ASSY XGTP300-20AS O-ring(Body opening side) FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGTP31 -50336-1 O-ring(Gate) AS568-271 Kalrez R4079 XGT300-9-11S XGTP31 -50336-2