Search Results "XGT222-46236-2C"
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Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
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How To Order: Slit Valve XGT Series x 222 46 x 236 50 x 336 Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.
Because of this, the lateral position is made unfixed. 3-2-4 Clamp release (Figure 2C to Figure 2B) Since the roller block is moved down when pressure is applied to OPEN side of pressure piping (in other words, pressure is exhausted from CLOSE side of pressure piping), the roller bearing B moves left along with the cam groove .
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