SMC Corporation of America
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Search Results "XGT222-46236-1C"
HIGH VACUUM VALVE, VACUUM SERIES, XGT HIGH VACUUM VALVE, 2X, XGT NO SIZE RATING, 23.67200 lb
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
  • Long service life: 3 million cycles (within standard temperture range)
  • Low particle generation: reduced by 1/5 or more (compared with the current product)
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Application Remarks XGT311-50336A1-1 For XGT31-50336C XGT311-50336A1-1A For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-