Search Results "XGT221-46236-1A"
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Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
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How To Order: Slit Valve XGT Series x 222 46 x 236 50 x 336 Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.
Construction / Operation 3-1 Construction 6 - 3-2 Operation Figure 1A and B are front view of a slit valve. In these figures, the slit valve closes an opening (slit) 23 which transfers workload and a gate (seal material ) does not clamp (seal) a seating face . In Figure 2A, the slit valve opens and makes the slit 23 able to transfer workload.
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