- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
How To Order: Slit Valve XGT Series Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32
Because of this, the lateral position is made unfixed. 3-2-4 Clamp release (Figure 2C to Figure 2B) Since the roller block is moved down when pressure is applied to OPEN side of pressure piping (in other words, pressure is exhausted from CLOSE side of pressure piping), the roller bearing B moves left along with the cam groove .
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